Optics for Variable Attenuators

The variable attenuators are optical devices, which vary the laser beam energy using the optical characteristics of multi-layers. It is possible to adjust the laser beam energy freely within a range of 5.0 to 90.0% according to the applications (5.0 to 80.0% at 193 nm). Available in the type A and type S.

The type A changes the transmittance by rotating its substrate, while the type S by sliding its substrate. The type A is subject to shift of the optical axis, since it rotates the substrate. It is possible to suppress the shift if a compensator is combined.

The type S is suitable for beams relatively small in diameter, since it uses a substrate coating with continuously changed transmittance. It features high laser resistance and space-saving..

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