Optics for Excimer Lasers

Optics for Excimer Lasers

SOC supplies the world's highest laser resistance products.

Optics for Excimer Lasers

Major Features

Optics for Excimer Lasers, Major Features
High laser resistivity
Highest-level KrF laser mirrors in the world
28J/cm2 @248nm, 15ns (Laser conditioning)
High reflectance
Applicable to VUV excimer laser
R > 95%@157nm
Low optical loss
R > 99.98% @1064 nm
Low absorption and low scattering

SOC has been working on development of coatings for Excimer laser for 20 years. High laser-resistivity mirrors for Excimer laser were established through R&D trying to get a number-one position without compromise. SOC flexibly meets various customer needs with the technology that deals with optics for high laser power Excimer lasers in the wavelength range from 126 nm to 352 nm.

Catalog Download

Laser Optics (pdf, 10,237KB)

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